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Monitoring coating process in vacuum chambers

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Monitoring coating process in vacuum chambers

Spectrometer AvaSpec-2048CL-EVO
Grating UA (200-1100 nm), 50 μm slit , DUV coating, DCL-UV/VIS-200, OSC-UA
Software AvaSoft-Full and ALL
Light source AvaLight-DH-S-BAL Balanced deuterium-halogen light source
Fiber optics FCR-7IRUV200-2-ME
FC-UVIR600-2-ME and FC-UVIR200-2-ME
Vacuum Feedthrough FC-VFT-UVIR200 and FC-VFT-UVIR600