제품소개
해외 우수한 분석, 측정, 계측기기 제조회사의 독점 대리점 !
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MSP SeriesMSP100
BEST Good
제품구성
| MSP100 | |
|---|---|
| Detector | CCD Array with 2048 pixels |
| Light Source | High power DUV-Visible |
| Automatic Stage | Black Anodized Aluminum Alloy with 5”x3” net travel distance and 1μm resolution, program controlled |
| Long Working Distance Objectives | 10x, 15x(DUV), 40x or 50x |
| Communication | USB |
| Measurement Type | Reflection/Transmission spectra, Film thickness/refractive index and feature dimensions |
| Computer & Monitor | Intel Core 2 Duo Processor with 200GB Hard drive and DVD+RW Burner plus 19” LCD Monitor |
| Power | 110 - 240 VAC /50-60Hz, 3 A |
제품사양
| MSP100 | |
|---|---|
| Wavelength range | 250 to 1700 nm |
| Wavelength resolution | 1 nm |
| Spot Size | 40 μm (10x), 30 μm (15x), 8 μm (50x) |
| Substrate Size |
|
| Measurable thickness range | 20 Å to 25 μm |
| Measurement Time | 2 ms minimum |
| Accuracy | Better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants) |
| Repeatability | < 2 Å (1 sigma from 50 thickness readings for 1500 Å Thermal SiO2 on Si Wafer) |
옵션
| MSP100 |
|---|
| Wavelength extension to to Further DUV or NIR range |
| Higher power DUV optics for smaller spot size |
| Customized configuration for special applications |
| Heating and Cooling Stage for dynamic study | Optional stage size holding samples up to 300mm |
| Higher wavelength range resolution down to 0.1nm |
| Various filters for special applications |
| Add-on accessories for fluorescence measurement |
| Add-on accessories for polarizing applications |
적용분야
| MSP100 |
|---|
|
|
| Forensics, Biological films and materials |
Inks, Mineralogy, Pigments, Toners |
| Optical coatings, TiO2, SiO2, Ta2O5..... |
| Semiconductor compounds |
| Functional films in MEMS/MOEMS |
| Amorphous, nano and crystalline Si |
적용사례
| Measured Transmission Spectra of Three Filters with Microspectrophotometer MSP100 | |
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| Measured Film Thickness with Microspectrophotometer MSP100 | |
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| Measured Reflection Spectrum over a MEMS Mirror with Microspectrophotometer MSP100 | |
| Mapped Thickness Uniformity over 4" wafer with Microspectrophotometer MSP100 |
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