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SR Series

제품이미지

Spectroscopic Reflectometer

SR500

  • 5 layers 이하의 막 두께 및 반사스펙트럼 측정
  • 2048픽셀 CCD Detector 사용
  • 250 - 1700nm의 파장영역
  • 샘플크기는 200x200mm or 200ø
  • 윈도우 기반의 소프트웨어와 함께 작동하기 용이
BEST Good
제품구성
제품구성
SR500
Dual Detector

CCD Array for UV-Vis and InGaAs Detector Array for

Near-Infrared (NIR)

Light Source Combined Deuterium and Halogen
Light Delivery Fiber Optics
Stage

Black Anodized Aluminum Alloy with Easy Adjustment for

sample height, 200 mm x 200 mm size

Communication USB
Measurement Type Film thickness, reflection spectrum, refractive index
Software

TFProbe 2.4/2.5

Computer needed P3 above with minimum 50 MB space
Power 110 - 240 VAC /50-60Hz, 1.5 A
제품사양
제품사양
SR500
Wavelength range 250 to 1700 nm
Spot Size 500 μm to 5 mm
Sample Size 200 x 200 mm or 200 mm in diameter
Substrate Size

Up to 50 mm thick

Measurable thickness range 2 nm to 150 μm
Measurement Time 2 ms minimum
Accuracy

Better than 0.5% (comparing with ellipsometry results for

Thermal Oxide sample by using the same optical constants)

Repeatability < 1A (1 sigma from 50 thickness readings for 1500 A Thermal SiO2 on Si Wafer)
옵션
옵션
SR500
  • Transmission Fixture for Transmission and Absorption Measurement (SR500RT)
  • Micro spot for measuring small area down to 5 μm size (MSP500)
Multiple Channel for simultaneously measurement at multiple locations (SR500xX)

Mapping uniformity over 200 or 300 mm wafer (SRM500-200 /300)

적용분야
적용분야
SR500
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap.....)
Forensics, Biological films and materials

Medial Devices

Optical coatings, TiO2, SiO2, Ta2O5.....
Semiconductor compounds
Functional films in MEMS/MOEMS
Amorphous, nano and crystalline Si