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박막두께측정기

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SR Series

제품이미지

Spectroscopic Reflectometer

SR300

  • 5 layers 이하의 막 두께 및 반사스펙트럼 측정
  • 2048픽셀 CCD Detector 사용
  • 400 - 1100nm의 파장영역
  • 샘플크기는 200x200mm or 200ø
  • 윈도우 기반의 소프트웨어와 함께 작동하기 용이
BEST Good
제품구성
제품구성
  SR300
Detector CCD Array with 2048 pixels
Light Source High stability and long lifetime Halogen
Light Delivery Fiber Optics
Stage

Black Anodized Aluminum Alloy with Easy Adjustment for

sample height, 200 mm x 200 mm size

Communication USB with computer
Measurement Type Film thickness, reflection spectrum, refractive index
Software TFProbe 2.x
Computer needed P3 above with minimum 50 MB space, 32 Bit OS
Power 110 - 240 VAC /50-60Hz, 1.5 A
제품사양
제품사양
  SR300
Wavelength range 400 to 1100 nm
Spot Size 500 μm to 5mm
Sample Size 200 x 200 mm or 200 mm in diameter
Substrate Size

Up to 50mm thick

Measurable thickness range 20 nm to 50 μm
Measurement Time 2 ms minimum
Accuracy

Better than 0.5% (comparing with ellipsometry results for

Thermal Oxide sample by using the same optical constants)

Repeatability < 1A (1 sigma from 50 thickness readings for 1500 A Thermal SiO2 on Si Wafer)
옵션
옵션
SR300
  • Transmission Fixture for Transmission and Absorption Measurement (SR300RT)
  • Micro spot for measuring small area down to 5 μm size (MSP300)
Multiple Channel for simultaneously measurement at multiple locations (SR300xX)

Mapping uniformity over 200 or 300 mm wafer (SRM300-200 /300)

적용분야
적용분야
SR300
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap.....)
Forensics, Biological films and materials

Inks, Mineralogy, Pigments, Toners

Pharmaceuticals, Medial Devices
Optical coatings, TiO2, SiO2, Ta2O5.....

Semiconductor compounds

Functional films in MEMS/MOEMS
Amorphous, nano and crystalline Si
적용사례
적용사례
Measured thicknesses for three layers Nitride-Oxide-Nitride on Glass
Measured Thickness for thick coating
Measured Reflection Spectrum and Thickness for Nano-crystalline Si